JPH01157169U - - Google Patents
Info
- Publication number
- JPH01157169U JPH01157169U JP5286288U JP5286288U JPH01157169U JP H01157169 U JPH01157169 U JP H01157169U JP 5286288 U JP5286288 U JP 5286288U JP 5286288 U JP5286288 U JP 5286288U JP H01157169 U JPH01157169 U JP H01157169U
- Authority
- JP
- Japan
- Prior art keywords
- partition plate
- holder
- substrate holder
- melt
- melt holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000155 melt Substances 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 4
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286288U JPH01157169U (en]) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286288U JPH01157169U (en]) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157169U true JPH01157169U (en]) | 1989-10-30 |
Family
ID=31278856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5286288U Pending JPH01157169U (en]) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157169U (en]) |
-
1988
- 1988-04-20 JP JP5286288U patent/JPH01157169U/ja active Pending
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